High-Precision Alumina Ceramic Wafer Loading Arm High purity silicon carbide arm for wafer moving

Ceramic robotic arm plays a role in handling in semiconductor equipment. It is equivalent to the hand of the robot of the semiconductor equipment and is responsible for carrying wafer silicon chips to the specified location. Because the wafer silicon chip is extremely vulnerable to other particles, it is generally carried out in a vacuum environment.

In this environment, the robotic arm of most materials is generally difficult to complete the work. Materials to make robotic arms require high temperature resistance, wear resistance, and hardness. At this time, some people found that fine ceramic materials can meet these conditions. There are two types of general ceramic robotic arms, one is alumina ceramic robotic arm, and the other is silicon carbide ceramic robotic arm.

Alumina ceramics and silicon carbide ceramics have the physical properties of dense quality, high hardness, and high abrasion resistance, as well as good thermal resistance, excellent mechanical strength, good insulation, good corrosion resistance, etc. It is an excellent material for making semiconductor equipment robotic arms.

But in terms of performance, the robotic arm made of silicon ceramics is better than the robotic arm made of alumina ceramics.

Normally sintering silicon carbide ceramic products are made of high-purity and ultra-fine silicon carbide microfillings. It is made of 2450℃ high-temperature sintering. The silicon carbide content is above 99.1%, and the density of the product is ≥3.10g/cm³.